Electro-thermal Stimuli for MEMS Testing in FSBM Technology

Journal of Electronic Testing 2006 / 04 Vol. 22; Iss. 2

Electro-thermal Stimuli for MEMS Testing in FSBM Technology

N. Dumas, F. Azaïs, L. Latorre, P. Nouet
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Volume:
22
Language:
english
Pages:
10
DOI:
10.1007/s10836-005-6132-7
Date:
April, 2006
File:
PDF, 590 KB
english, 2006
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