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Surface reaction mechanisms during atomic layer deposition of zirconium oxide using water, ethanol, and water-ethanol mixture as the oxygen sources
Xu, Wanxing, Lemaire, Paul C., Sharma, Kashish, Hausmann, Dennis M., Agarwal, SumitVolume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5122994
Date:
January, 2020
File:
PDF, 1.67 MB
2020