Application of a B-spline model dielectric function to...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 01 Vol. 38; Iss. 1

Application of a B-spline model dielectric function to infrared spectroscopic ellipsometry data analysis

Mohrmann, Joel, Tiwald, Thomas E., Hale, Jeffrey S., Hilfiker, James N., Martin, Andrew C.
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Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5126110
Date:
January, 2020
File:
PDF, 2.71 MB
2020
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