Investigation of phases and chemical states of tin titanate...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 01 Vol. 38; Iss. 1

Investigation of phases and chemical states of tin titanate films grown by atomic layer deposition

Chung, Hong Keun, Pyeon, Jung Joon, Baek, In-Hwan, Lee, Ga-Yeon, Lee, Hansol, Won, Sung Ok, Han, Jeong Hwan, Chung, Taek-Mo, Park, Tae Joo, Kim, Seong Keun
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5134136
Date:
January, 2020
File:
PDF, 1.76 MB
2020
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