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Ultraviolet Nanosecond Laser Annealing for Low Temperature 3D-Sequential Integration Gate Stack
Kerdilès, Sébastien, Acosta-Alba, Pablo, Royet, Anne-Sophie, Lassarre, Jessica, Perrot, Cédric, Aussenac, François, Brunet, Laurent, Fenouillet-Beranger, ClaireVolume:
93
Journal:
ECS Transactions
DOI:
10.1149/09301.0019ecst
Date:
October, 2019
File:
PDF, 262 KB
2019