![](/img/cover-not-exists.png)
Data Mining using Genetic Programming for Construction of a Semiconductor Manufacturing Yield Rate Prediction System
Te-Sheng Li, Cheng-Lung Huang, Zong-Yuan WuVolume:
17
Language:
english
Pages:
7
DOI:
10.1007/s10845-005-0008-7
Date:
June, 2006
File:
PDF, 144 KB
english, 2006