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Properties and characterization of low-temperature amorphous PECVD silicon nitride films for solar cell passivation
S. Ali, M. Gharghi, S. Sivoththaman, K. ZeaiterVolume:
40
Language:
english
Pages:
5
DOI:
10.1007/s10853-005-0585-z
Date:
March, 2005
File:
PDF, 1014 KB
english, 2005