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RF-power-controlled young's modulus of plasma-polymerized organosilicon films
V. Cech, J. Vanek, A. A. Goruppa, F. R. JonesVolume:
40
Language:
english
Pages:
4
DOI:
10.1007/s10853-005-1672-x
Date:
September, 2005
File:
PDF, 646 KB
english, 2005