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Effects of annealing temperature on the optical, bonding, structural and electrical properties of nitrogenated amorphous carbon thin films grown by surface wave microwave plasma chemical vapor deposition
M. Rusop, A. M. M. Omer, S. Adhikari, S. Adhikary, H. Uchida, T. Soga, T. Jimbo, M. UmenoVolume:
41
Language:
english
Pages:
11
DOI:
10.1007/s10853-005-2635-y
Date:
January, 2006
File:
PDF, 1.88 MB
english, 2006