Micro-Raman spectroscopy and X-ray diffraction studies of...

Journal of Materials Science 2005 / 08 Vol. 40; Iss. 16

Micro-Raman spectroscopy and X-ray diffraction studies of atomic-layer-deposited ZrO2and HfO2thin films

S. N. Tkachev, M. H. Manghnani, A. Niilisk, J. Aarik, H. Mändar
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Volume:
40
Language:
english
Pages:
6
DOI:
10.1007/s10853-005-2826-6
Date:
August, 2005
File:
PDF, 698 KB
english, 2005
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