Growth of highlyc-axis oriented aluminum nitride thin films on β-tantalum bottom electrodes
M. Akiyama, N. Ueno, K. Nagao, T. YamadaVolume:
41
Language:
english
Pages:
4
DOI:
10.1007/s10853-006-0051-6
Date:
July, 2006
File:
PDF, 248 KB
english, 2006