Dependence of the resistivity and the transmittance of sputter-deposited Ga-doped ZnO films on oxygen partial pressure and sputtering temperature
Sookjoo Kim, Wan In Lee, El-Hang Lee, S. K. Hwang, Chongmu LeeVolume:
42
Language:
english
Pages:
5
DOI:
10.1007/s10853-006-0738-8
Date:
July, 2007
File:
PDF, 204 KB
english, 2007