Effect of CMP Pad Exposure to Aqueous Media on the Pad Properties. Part 1. Dynamic Mechanical and Modulated DSC Analysis
Tregub, A., Moinpour, M., Sorooshian, J.Volume:
732
Year:
2002
Journal:
MRS Proceedings
DOI:
10.1557/PROC-732-I5.4
File:
PDF, 441 KB
2002