Effect of CMP Pad Exposure to Aqueous Media on the Pad...

Effect of CMP Pad Exposure to Aqueous Media on the Pad Properties. Part 1. Dynamic Mechanical and Modulated DSC Analysis

Tregub, A., Moinpour, M., Sorooshian, J.
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Volume:
732
Year:
2002
Journal:
MRS Proceedings
DOI:
10.1557/PROC-732-I5.4
File:
PDF, 441 KB
2002
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