[Laser Institute of America ICALEO® 2013: 32nd International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing - Miami, Florida, USA (October 6–10, 2013)] International Congress on Applications of Lasers & Electro-Optics - Parallel femtosecond laser processing using intensity modulated diffraction pattern produced with spatial light modulator
Kaakkunen, Jarno J. J., Silvennoinen, Martti, Päiväsaari, Kimmo, Laakso, Petri, Vahimaa, PasiYear:
2013
DOI:
10.2351/1.5062948
File:
PDF, 415 KB
2013