Recent Progress of Miniature MEMS Pressure Sensors

Micromachines 2020 / 01 Vol. 11; Iss. 1

Recent Progress of Miniature MEMS Pressure Sensors

Song, Peishuai, Ma, Zhe, Ma, Jing, Yang, Liangliang, Wei, Jiangtao, Zhao, Yongmei, Zhang, Mingliang, Yang, Fuhua, Wang, Xiaodong
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Volume:
11
Journal:
Micromachines
DOI:
10.3390/mi11010056
Date:
January, 2020
File:
PDF, 2.73 MB
2020
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