Force Characterization of a Rotary Motion Electrostatic...

Applied Mechanics and Materials 2015 / 5 Vol. 761

Force Characterization of a Rotary Motion Electrostatic Actuator Based on Finite Element Method (FEM) Analysis

Md Ghazaly, Mariam, Choon, Tan Aik, Aliza, Che Amran, Kaiji, Sato
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Volume:
761
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/amm.761.233
Date:
May, 2015
File:
PDF, 754 KB
2015
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