The Impact of the Deposition Parameters on the Mechanical Properties of Thin Carbon Layers
Voleský, Lukáš, Bakalova, Totka, Borůvková, Karolína, Louda, PetrVolume:
368
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/ddf.368.95
Date:
July, 2016
File:
PDF, 281 KB
2016