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Improvement of Structural, Morphological and Mechanical Properties of CrNx Sputtered Thin Films by Vacuum Annealing Process
Nualkham, Intira, Sakdanuphab, Rachsak, Sakulkalavek, AparpornVolume:
751
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.751.113
Date:
August, 2017
File:
PDF, 990 KB
2017