Chemical Vapor Deposition of AlZrN Coatings by the Reaction...

Key Engineering Materials 2019 / 6 Vol. 809

Chemical Vapor Deposition of AlZrN Coatings by the Reaction of In Situ Produced ZrCl4 and AlCl3 with NH3

Rauchenwald, Elisabeth, Lessiak, Mario, Weissenbacher, Ronald, Haubner, Roland
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Volume:
809
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.809.427
Date:
June, 2019
File:
PDF, 698 KB
2019
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