Microstructure Investigation of He+- Implanted and...

Key Engineering Materials 2019 / 7 Vol. 814

Microstructure Investigation of He+- Implanted and Post-Implantation-Annealed 4H-SiC

Zhang, Li Qing, Liu, Hui Ping, Kang, Long, Zhang, Tong Min, Chen, Yu Guang, Zhang, Xian Long, Ding, Zhao Nan, Li, Jian Yang, Liu, Juan, Li, Jin Yu, Zhang, Chong Hong
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Volume:
814
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.814.302
Date:
July, 2019
File:
PDF, 983 KB
2019
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