Effect of HCL on Surface Free Energy of SiC during CVD...

Materials Science Forum 2019 / 7 Vol. 963

Effect of HCL on Surface Free Energy of SiC during CVD Trench Filling

Mochizuki, Kazuhiro, Ji, Shi Yang, Kosugi, Ryoji, Yonezawa, Yoshiyuki, Okumura, Hajime
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Volume:
963
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.963.136
Date:
July, 2019
File:
PDF, 634 KB
2019
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