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Sub-nm-Scale Depth Profiling of Nitrogen in NO- and N2-Annealed SiO2/4H-SiC(0001) Structures
Moges, Kidist, Sometani, Mitsuru, Hosoi, Takuji, Shimura, Takayoshi, Harada, Shinsuke, Watanabe, HeijiVolume:
963
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.963.226
Date:
July, 2019
File:
PDF, 995 KB
2019