Decoration of Al Implantation Profiles in 4H-SiC by Bevel...

Materials Science Forum 2019 / 7 Vol. 963

Decoration of Al Implantation Profiles in 4H-SiC by Bevel Grinding and Dry Oxidation

Kocher, Matthias, Erlbacher, Tobias, Rommel, Mathias, Bauer, Anton
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
963
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.963.441
Date:
July, 2019
File:
PDF, 2.54 MB
2019
Conversion to is in progress
Conversion to is failed