Various Applications of Multifunctional Thin Films with Specific Properties Deposited by the ALD Method
Boryło, Paulina, Szindler, Marek, Lukaszkowicz, KrzysztofVolume:
293
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.293.111
Date:
July, 2019
File:
PDF, 7.86 MB
2019