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The Role of Oxide Formation on Insulating Versus Metallic Substrates During Co and Ru Selective ALD
Wolf, Steven, Breeden, Michael, Ueda, Scott, Woodruff, Jacob, Moinpour, Mansour, Kanjolia, Ravindra, Kummel, AndrewJournal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.144804
Date:
December, 2019
File:
PDF, 3.65 MB
2019