Characteristics of graphene grown through low power...

Carbon 2020 / 04 Vol. 159

Characteristics of graphene grown through low power capacitive coupled radio frequency plasma enhanced chemical vapor deposition

Chang, Yu-Chen, Yen, Chun-Chieh, Tsai, Hung-Chieh, Chen, Tsung Cheng, Yang, Chia-Ming, Chen, Chia-Hao, Woon, Wei-Yen
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Volume:
159
Journal:
Carbon
DOI:
10.1016/j.carbon.2019.12.093
Date:
April, 2020
File:
PDF, 4.04 MB
2020
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