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A single phase semiconducting Ca-silicide film growth by sputtering conditions, annealing temperature and annealing time
Yang Yinye, Xie QuanVolume:
44
Language:
english
Pages:
6
DOI:
10.1007/s10853-009-3529-1
Date:
July, 2009
File:
PDF, 383 KB
english, 2009