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Combination of a millimeter scale reactor and gas chromatography-mass spectrometry for mapping higher order silane formation during monosilane pyrolysis
Wyller, Guro Marie, Preston, Thomas J., Anjitha, S.G., Skare, Marte O., Marstein, Erik S.Volume:
530
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2019.125305
Date:
January, 2020
File:
PDF, 2.13 MB
2020