Microstructure and mechanical properties of AlN films obtained by plasma enhanced chemical vapor deposition
Gustavo Sánchez, B. Abdallah, P. Tristant, C. Dublanche-Tixier, M. A. Djouadi, M. P. Besland, P. Y. Jouan, A. Bologna AllesVolume:
44
Language:
english
Pages:
10
DOI:
10.1007/s10853-009-3847-3
Date:
November, 2009
File:
PDF, 623 KB
english, 2009