Investigation and optimization of electrical and thermal...

Microelectronics Journal 2020 / 01 Vol. 95

Investigation and optimization of electrical and thermal performance for 5-nm GAA vertically stacked nanowire FETs

Huang, Ning, Liu, Weijing, Li, Qinghua, Bai, Wei, Tang, Xiadong, Yang, Ting
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Volume:
95
Journal:
Microelectronics Journal
DOI:
10.1016/j.mejo.2019.104679
Date:
January, 2020
File:
PDF, 2.36 MB
2020
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