Influence of ion energy on damage induced by Au-ion...

Journal of Materials Science 2011 / 10 Vol. 46; Iss. 19

Influence of ion energy on damage induced by Au-ion implantation in silicon carbide single crystals

Aurélie Gentils, Florence Linez, Aurélien Canizarès, Patrick Simon, Lionel Thomé, Marie-France Barthe
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Volume:
46
Language:
english
Pages:
6
DOI:
10.1007/s10853-011-5587-4
Date:
October, 2011
File:
PDF, 583 KB
english, 2011
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