Tunable surface hardness and dielectric constant of SiCxOythin film converted from solution-processed organosilicon compound
Pyoung-Chan Lee, Sieun Kim, Taeseon Hwang, Joon-Suk Oh, Yong-Soo Oh, Lyongsun Pu, Byung-Woo Kim, Youngkwan Lee, Hyouk Ryeol Choi, Sun Kyoung Jeoung, Jae-Do NamVolume:
47
Language:
english
Pages:
6
DOI:
10.1007/s10853-012-6312-7
Date:
June, 2012
File:
PDF, 416 KB
english, 2012