Optical, structural and electrical characteristics of...

Journal of Materials Science: Materials in Electronics 2005 / 10 Vol. 16; Iss. 10

Optical, structural and electrical characteristics of aluminum oxynitride thin films deposited in an Ar-N gas mixture RF-sputtering system

J. J. Araiza, M. Aguilar-Frutis, C. Falcony, Ma. Jergel
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
16
Language:
english
Pages:
5
DOI:
10.1007/s10854-005-3741-y
Date:
October, 2005
File:
PDF, 1.42 MB
english, 2005
Conversion to is in progress
Conversion to is failed