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Physical, electrical, and optical properties of SF-PECVD-grown hydrogenated microcrystalline silicon with growth surface electrical bias
Erik V. Johnson, Sjoerd Hoogland, Ethan Klem, Nazir Kherani, Stefan ZukotynskiVolume:
17
Language:
english
Pages:
11
DOI:
10.1007/s10854-006-0025-0
Date:
October, 2006
File:
PDF, 448 KB
english, 2006