Wet etching of sputtered tantalum thin films in NaOH and...

Wet etching of sputtered tantalum thin films in NaOH and KOH based solutions

S. Sood, R. Peelamedu, K. B. Sundaram, E. Dein, R. M. Todi
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Volume:
18
Language:
english
Pages:
5
DOI:
10.1007/s10854-006-9053-z
Date:
May, 2007
File:
PDF, 369 KB
english, 2007
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