Aluminum doped ZnO by reactive sputtering of coaxial Zn and...

Journal of Materials Science: Materials in Electronics 2007 / 06 Vol. 18; Iss. 6

Aluminum doped ZnO by reactive sputtering of coaxial Zn and Al metallic targets

M. A. Santana-Aranda, A. Armenta-Estrada, C. Mendoza-Barrera, C. R. Michel, A. Chávez-Chávez, S. Jiménez-Sandoval, M. Meléndez-Lira
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Volume:
18
Language:
english
Pages:
4
DOI:
10.1007/s10854-006-9115-2
Date:
June, 2007
File:
PDF, 226 KB
english, 2007
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