Copper nitride films deposited by dc reactive magnetron...

Journal of Materials Science: Materials in Electronics 2007 / 10 Vol. 18; Iss. 10

Copper nitride films deposited by dc reactive magnetron sputtering

K. Venkata Subba Reddy, A. Sivasankar Reddy, P. Sreedhara Reddy, S. Uthanna
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Volume:
18
Language:
english
Pages:
6
DOI:
10.1007/s10854-007-9120-0
Date:
October, 2007
File:
PDF, 407 KB
english, 2007
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