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ITO films deposited by facing target sputtering
Osamu Kamiya, Yusuke Onai, Hiro-omi Kato, Yoichi HoshiVolume:
18
Language:
english
Pages:
4
DOI:
10.1007/s10854-007-9240-6
Date:
October, 2007
File:
PDF, 413 KB
english, 2007