Optical properties of amorphous silicon nitride thin-films prepared by VHF-PECVD using silane and nitrogen
Wee Chong Tan, S. Kobayashi, T. Aoki, Robert E. Johanson, S. O. KasapVolume:
20
Language:
english
Pages:
4
DOI:
10.1007/s10854-007-9422-2
Date:
January, 2009
File:
PDF, 340 KB
english, 2009