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Structure properties of carbon implanted silicon layers
K. Kh. Nussupov, N. B. Beisenkhanov, I. V. Valitova, K. A. Mit’, D. M. Mukhamedshina, E. A. DmitrievaVolume:
19
Language:
english
Pages:
9
DOI:
10.1007/s10854-007-9533-9
Date:
December, 2008
File:
PDF, 562 KB
english, 2008