Study of nanopipes formed in silicon wafers using helium...

Journal of Materials Science: Materials in Electronics 2008 / 12 Vol. 19; Iss. 1 Suppleme

Study of nanopipes formed in silicon wafers using helium implantation by SEM, RBS and SIMS methods

A. V. Frantskevich, A. M. Saad, A. V. Mazanik, N. V. Frantskevich, A. K. Fedotov, V. S. Kulinkauskas, A. A. Patryn
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Volume:
19
Language:
english
Pages:
4
DOI:
10.1007/s10854-008-9654-9
Date:
December, 2008
File:
PDF, 246 KB
english, 2008
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