Effect of silicidation on silicon-based thin film resistors...

Journal of Materials Science: Materials in Electronics 2009 / 04 Vol. 20; Iss. 4

Effect of silicidation on silicon-based thin film resistors in SiGe integrated circuits

Sang-Heung Lee, Seung-Yun Lee, Chan Woo Park, Dongwoo Suh
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Volume:
20
Language:
english
Pages:
6
DOI:
10.1007/s10854-008-9733-y
Date:
April, 2009
File:
PDF, 372 KB
english, 2009
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