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Effects of post-deposition annealing temperature and ambient on RF magnetron sputtered Sm2O3gate on n-type silicon substrate
Wen Chiao Chin, Kuan Yew CheongVolume:
22
Language:
english
Pages:
11
DOI:
10.1007/s10854-011-0368-z
Date:
December, 2011
File:
PDF, 1.06 MB
english, 2011