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Implantation profiles and sputtering studied by detecting the optical radiation from sputtered particles during ion bombardment
Emmoth, B, Braun, M, Palenius, H.PVolume:
63
Journal:
Journal of Nuclear Materials
DOI:
10.1016/0022-3115(76)90253-1
Date:
December, 1976
File:
PDF, 530 KB
1976