A Deep Learning Framework for Simulation and Defect...

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A Deep Learning Framework for Simulation and Defect Prediction Applied in Microelectronics

Dimitriou, Nikolaos, Leontaris, Lampros, Vafeiadis, Thanasis, Ioannidis, Dimosthenis, Wotherspoon, Tracy, Tinker, Gregory, Tzovaras, Dimitrios
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Journal:
Simulation Modelling Practice and Theory
DOI:
10.1016/j.simpat.2019.102063
Date:
December, 2019
File:
PDF, 6.38 MB
2019
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