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[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Improved R[sub s] Monitoring for Robust Process Control of High Energy Well Implants
Kim, J. H., Kim, S., Ra, G. J., Lee, K. W., Reece, R. N., Bae, S. Y., Seebauer, Edmund G., Felch, Susan B., Jain, Amitabh, Kondratenko, Yevgeniy V.Year:
2008
DOI:
10.1063/1.3033586
File:
PDF, 701 KB
2008