[AIP AIP Conference Proceedings Vol. 50 - ()] AIP Conference Proceedings - Annealing of ion-implanted Si using scanned laser and electron beams
Gibbons, J. F., Gat, A., Gerzberg, L., Lietoila, A., Regolini, J. L., Sigmon, T. W., Pease, R. F. W., Magee, T. J., Peng, J., Hong, J., Deline, V., Katz, W., Williams, P., Evans, C. A.Volume:
50
Year:
1979
DOI:
10.1063/1.31683
File:
PDF, 1.04 MB
1979