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[AIP Advanced processing and characterization technologies - Clearwater, Florida (USA) (8−10 May 1991)] AIP Conference Proceedings - Laser scatterometry for process characterization
Gaspar, S. M., Hickman, K. C., Bishop, K. P., Naqvi, S. S., McNeil, J. R., Wilson, Scott, Strausser, Yale E., Gottscho, Richard A., Kornblit, AviVolume:
227
Year:
1991
DOI:
10.1063/1.40622
File:
PDF, 404 KB
1991