Polycrystalline diamond film fabrication using modulated...

Journal of Applied Physics 2019 / 12 Vol. 126; Iss. 22

Polycrystalline diamond film fabrication using modulated inductively coupled thermal plasmas at different pressure conditions

Hata, Kazufumi, Tanaka, Yasunori, Nakano, Yusuke, Arai, Takashi, Uesugi, Yoshihiko, Ishijima, Tatsuo
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Volume:
126
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5124058
Date:
December, 2019
File:
PDF, 7.34 MB
2019
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