Nanoscale etching of perovskite oxides for field effect...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 01 Vol. 38; Iss. 1

Nanoscale etching of perovskite oxides for field effect transistor applications

Cheng, Junao, Yang, Hao, Wang, Caiyu, Combs, Nick, Freeze, Chris, Shoron, Omor, Wu, Wangzhou, Kalarickal, Nidhin Kurian, Chandrasekar, Hareesh, Stemmer, Susanne, Rajan, Siddharth, Lu, Wu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5122667
Date:
January, 2020
File:
PDF, 3.26 MB
2020
Conversion to is in progress
Conversion to is failed